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June 27-29, 2020
Shanghai New International Expo Centre

Robert Gunn


Robert Gunn
Senior Product Manager – Etch, Oxford Instruments Plasma Technology
蚀刻机高级产品经理,英国牛津仪器

摘要 / Abstract

Applications such as facial recognition and datacomms are driving demand for GaAs and InP based lasers. In order to ensure efficient devices whilst controlling cost at maximised yield, specialised process solutions are required. By focussed development and leveraging over 37 years of CS technology, Oxford Instruments Plasma Technology has produced advanced Plasma processing solutions that give superior device performance and cost down per wafer. Working closely with our customers we ensure they have the tools to get the most out of their devices.