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Aditya Vyas Vice President of Business Development, Onto Innovation,Inc. |
讲师简介 / Speaker Bio Aditya Vyas is Vice President of Business Development at Onto Innovation with two decades of experience within various roles in applications, product management, marketing, sales and business development across multiple process control companies, including ADE, KLA and recently Onto Innovation. He has a Master's degree in computer engineering from the University of Massachusetts. Aditya is passionate about metrology and inspection solutions, focusing on customer success in power semiconductors. 摘要 / Abstract With the current demand for power devices across multiple applications is soaring, device makers are developing production solutions across multiple material sets including Silicon, Silicon Carbide, Gallium Nitride and others. With each device technology offering specific performance attributes comes a specific device architecture and inherent device processing challenges unique to both the material and device design. This presentation focuses on the needs of SiC and GaN power devices as it explores some of the key high value problems in manufacturing that directly impact device performance and yield, while discussing the metrology and inspection techniques that have been developed to help address each. |