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March 14-16,2018
Shanghai New International Expo Centre

Dr. Yiping Xu

Dr. Yiping Xu
Sr.Vice President ahd CTO,Raintree Technologies Corp

Yiping Xu is with Raintree Scientific Instruments Corporation as Sr. Vice President and CTO. He was a Technical Director of Brion Technologyies (An ASML Company) and managed IPs for computational lithography including mask verification and OPC design technologies. Prior to that, he was a principal research scientist with KLA-Tencor, where he focused on developing advanced technologies for overlay and critical dimension (CD) metrology as well as mask and wafer defect inspection for process control in semiconductor manufacturing. He was the principal inventor of KLA-Tencor’s Optical scatterometry product (OCD) which has been widely used as a main viable metrology tool for current and future generations of IC manufacturing. He also was a Sr. Research Engineer and project manager of Veeco Instruments (WYKO Corporation), developed technologies for non-contact optical 3D surface profilers using phase-shifting interferometry (PSI) and white-light interferometry (WLI).

He has published numerous papers on optical metrology and defect inspection technology and holds five U.S. patents and 4 Chinese patents. He received a bachelor's in Radio Engineering from Southeast University, and a Master’s degrees and a Ph.D. degree in Electrical and Computer Engineering from University of California, Santa Barbara. He is a senior member of IEEE, a member of SPIE and Tau Beta Pi.