Phd. TSUTOMU TSUKADA
Head of technology department, Kanken Techno Co., Ltd.

Biography

19　August 1948 Born in Chiba
March 1972    B.E. in Industrial Chemistry, Tokyo University
March 1974    M.E. in Industrial Chemistry, Tokyo University
April 1974    Joined Nichden Valian Co., Ltd. (Present name is Canon Anelva.)
          Developed Dry Etching Equipments and Plasma source.
Dec. 1993    PhD.E. in Applied Phisics, Tokyo University
The title of diss. "Effects of equipment structures and etching parameters on reactive ion etching"
April 2003    Visiting Professr in Keio Gijyuku University
March 2004    Joine FOI Co., Ltd.
May 2007    Joine Kanken Techno Co., Ltd.