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Xianggui (Shawn) Ye obtained his Ph. D degree from Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, majoring in physics and chemistry of polymers. He joined Brewer Science, Inc. in June 2018 as a Computational Material Scientist. Prior to joining Brewer Science, he was a Scientist with the University of Tennessee at Knoxville. He specializes in applying theory, computer simulation, and experimental validation to facilitate greater understanding of silicon hardmask materials and other materials and their use in lithography applications. In this invited talk, “Are Surfaces of Silicon Hardmasks Adaptive?”, Shawn will explore theories and testing that give insight into the behavior of silicon hardmask materials.
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