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Cheung Kong Scholar Distinguished Professor, Chief Research Professor of the Department of Mechanical Engineering of Tsinghua University, Chairman and Chief Scientist of Hwatsing Technology Co. Ltd.
The research areas of Professor Xinchun Lu include micro/nano manufacturing, theory and application of micro/nano tribology on surface and interface. Professor Lu has been engaged in theoretical, technological, and equipment research related to the manufacturing of key Integrated Circuit equipment such as chemical mechanical polishing (CMP) and ultra-precision grinding. He has published over 200 papers and has been authorized over 100 patents. Furthermore, he has founded Hwatsing Technology Co. Ltd. which provides advanced 12-inch CMP equipment and ultra-precision grinder for IC manufacturing industries.
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