|
Dr. Li-Qun Xia VP, Master Applied Materials, USA |
|
Li-Qun Xia received the Ph.D in chemical engineering from Cornell University, Ithaca, NY. He joined Applied Materials, Inc. in 1995 as a process engineer in the SACVD division. Currently he is the Technology VP (Master) in Dielectric Deposition Product (DDP) Business Unit. In the past decades, he has led engineering team for the development, integration and commercialization of the CVD low k materials (Black Diamond, BLOk) for inter-metal dielectric applications, Si strain engineering solutions, multi-patterning (SADP, SAQP) and ALD products. Dr. Xia holds over 250 US and international patents in semiconductor material, process, integration and equipment. He has over 50 journal publications/conference papers and co-authored the book chapter "Chemical Vapor Deposition" in 《Handbook of Semiconductor Manufacturing Technology》. |
|
