Dr. Huiyan Pei

Pei Huiyun received Ph.D from Shanghai Institute of Technical Physics of the Chinese Academy of Science (SITP) in 2001. Since then he has been working in Lam Research China in Etch Product Group. He is now  Engineering Process Director in charge of advanced technology development and application including 2D/3D logic, 2D/3D NAND, DRAM, Emerging memory, CIS and MEMS.  In addition, he also manage Thin Film and Clean Department and work on advanced integrated module solution. He published 15 papares and own 2 patents.