Dr. Jun He 何军 博士
Vice President of Quality and Reliability, TSMC
质量暨可靠性副总经理,台积电

个人简介 / Biography

学历:

美国加利福尼亚大学圣塔芭芭拉分校材料科学博士

经历:

台积公司先进技术质量暨可靠性资深处长

美商英特尔公司技术暨制造群质量暨可靠性主管暨资深处长

何军博士为台积公司质量暨可靠性部门副总经理,负责的业务范围涵盖台积公司专业集成电路制造服务生态系统,其中包括原物料验证、新制程技术及设计IP核的可靠性与验证、生产制造质量、并协助客户确保产品的优异质量与可靠性,以顺利量产。何军博士于2017年加入台积公司,担任先进技术质量暨可靠性资深处长,带领团队致力于分析及测试方法的开发与创新,有效检测可靠性缺陷并拦截有瑕疵的产品,协助台积公司顺利加速7奈米与5奈米技术的推出与量产。此外,何军博士于2019年建构了更完整的台积公司原物料质量管理系统,并强化了公司与主要材料供货商的合作伙伴关系。

加入台积公司之前,何军博士曾任美商英特尔公司技术暨制造群质量暨可靠性资深处长,全面负责制程技术开发与制造的质量暨可靠性,范围涵盖硅研发、先进封测、以及英特尔公司全球的制造营运。何军博士在低介电质整合、封装瑕疵辨识、以及先进单次可程序只读存储器开发等领域的技术成就深获肯定,共三次荣获英特尔成就奖,也是该公司最高的技术成就奖项。

何军博士拥有36项全球专利,其中28项为美国专利,并在国际会议及同业专家审核的技术期刊共发表超过50篇论文。何军博士于美国加利福尼亚大学圣塔芭芭拉分校取得物理学士及材料科学博士学位。

摘要/ Abstract

The semiconductor industry is becoming an indispensable element of our daily life. Any large-scale quality/reliability excursions or supply disruptions in semiconductor products could potentially affect our society significantly. Therefore, it is our industry’s joint responsibility to focus on business continuity and manufacturing quality. However, as the technology node continues to shrink, the process window of semiconductor manufacturing is getting much tighter, and small fluctuations in raw materials may directly impact semiconductor product or line stability. Chipmakers have to work together with material suppliers to improve the quality of raw materials including their upstream components to ensure variations are within downstream process tolerance. TSMC is committed to collaborate with material industry on defect detection, process control, material characterization and business continuity management to advance industry’s material quality system. In parallel, for material batches deviating away from baseline, we will also run qualification through a quarantined fab process line in attempt to continue enlarge acceptance window. We strongly believe in this win-win partnership. Together, we can continue make “technical impossible” possible and fulfill social responsibility expected upon our industry.