Dr. Martyn Green
Director of Sales - Asia DCA Instruments Oy

讲师简介 / Speaker Bio

Dr. Martyn Green is Director of Sales in Asia for DCA Instruments a business known for high performance Molecular Beam Epitaxy (MBE), Sputtering and Pulsed Laser Deposition tools for the semiconductor, photonics, quantum materials sectors. Prior to DCA Instruments, Martyn has acted as a consultant and held senior positions in a number of scientific businesses across a career of almost 25 years.

摘要 / Abstract

Molecular Beam Epitaxy (MBE) grown devices have demonstrated superior performance characteristics across a wide range of semiconductor materials, when compared to traditional production methods. However, the challenges of scale up and integration with other processes has limited its use in Foundries. DCA Instruments have over the past 12 months delivered advanced MBE production tools with integrated EFEM and multi-wafer 300mm wafer FOUP cassettes for reproduceable device manufacture. During this presentation we will demonstrate how this new capability is enabling rapid advances in semiconductor production, particularly in the fields of Photonics and Quantum Materials.