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Mr. Zheng Tao serves as the vice president of etching product center at Leuven Instruments. He leads the research projects for the development of Chimera 300mm ICP etch systems for advanced node of logic and memory devices. His research focus is on process technology and integration, advanced patterning, ion beam etch technology and plasma physics. Prior to joining Leuven Instruments, he was PMTS in advanced patterning department of imec for over 10 years. Prior to that, he worked for AMEC, Sony, UMCi, Lam research in the field of plasma etch and process development since year 2000. Mr. Zheng Tao received his bachelor degree in Chemistry from Fudan University, China. He holds more than 30 patents and has published ~10 academic papers in international journals and conferences.
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