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Dr. Kailiang ZHANG Tianjin University of Science & Technology, China |
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“Kailiang Zhang”, Ph.D., Professor of microelectronics and materials chemistry, has been at Tianjin University of Technology and Chinese Academy of Sciences for 5 years (or since 2004) with responsibility of CMP technology and slurry for new materials. Dr. Kailiang Zhang received a PhD degree in microelectronics and solid state electronics field from Hebei University of Technology, Tianjin, Hebei Province, China and a master degree in materials sciences field from Hebei University of Technology, Tianjin, Hebei Province, China. Dr. Kailiang Zhang focuses on directing development activities for CMP and new interconnect materials projects, such as nano-particles for CMP and Carbon Nanotubes for next generation interconnection. He regularly delivers presentations in some technical conferences. He has authored and/or co-authored over 60 technical papers and presentations. Dr. Kailiang Zhang holds 13 patents about nano-abrasives for CMP and fabrication technology of nanoelectronic devices. |
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