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Harmeet Singh Corporate Vice President, Lam Research |
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Abstract The fast-growing data economy is creating tremendous demand for memory devices for data processing and storage. DRAM, 3D NAND, and emerging storage-class memory technologies all require advanced etch, deposition and process control solutions enabling extremely high aspect ratio and complex structures. In this talk, we will discuss the manufacturing aspect of making next-generation memory devices – the complexity, process challenges and solutions to overcome such. We will also discuss manufacturing requirement and roadmap for future generations of memory devices. |
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