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Hakaru Mizoguchi is Senior Fellow, Gigaphoton Inc., Fellow member of The International Society of Optical Engineering (SPIE), and also member of The Laser Society of Japan and The Japan Society of Applied Physics. He received a diplomat degree in plasma diagnostics field from the Kyushu university, Fukuoka, Japan in 1982 and join Komatsu ltd.. He joined CO2 laser development program in Komatsu for 6 years. After that he was guest scientist of Max-Plank Institute Bio-Physikalish-Chemie in Goettingen in Germany 2 years, from 1988 to 1990. Since 1990 he concentrated on KrF, ArF excimer laser and F2 laser research and development for lithography application. He was general manager of research division in Komatsu Ltd. until 1999. He got Dr. degree in high power excimer laser field from Kyushu university in 1994. In 2000 Gigaphoton Inc. was founded. He was one of the founders of Gigaphoton Inc.. From 2002 to 2010 he organized EUV research group in EUVA program. Now he is promoting EUV light source product development to now. He got Sakurai award from OITDA Japan in 2018. He got IAAM Scientist Award in 2020. And he is guest professor of Kyushu university since 2021.
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