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Zhang Lei, 1986, received his Ph.D. degree in University of Shanghai for Science and Technology in 2015; Master: 2009.09-2011.09 Chemical Process Equipment University of Shanghai for Science and Technology; Bachelor: 2005.09-2009.06 Process Equipment and Control Engineering Hebei University. Now is working at technology development division of Shanghai Huali Microelectronics Corporation as a CMP process R&D Senior engineer.
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