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Prof. Weili Liu received her PhD in Microelectronics from Shanghai Institute of Microsystem and Information Technology, CAS in 2002, and then she worked in this institute until now. Her research interests include nano materials, semiconductor materials and devices, chemical mechanical polishing, etc. She has full experience in silica-based semiconductor materials, new fabrication technology and surface modified technology of nano materials and CMP slurry. Prof.Liu has successfully developed high purity colloidal silica and slurry for CMP, and these materials have been widely used in the fields of IC, LED and mobile phone. She has published more than 100 SCI papers, and applied more than 80 patents. And she received the first prize of technical invention in Shanghai, the first prize of national science and technology progress award, the first prize of Shanghai science and technology progress award, outstanding science and technology achievement prize of the Chinese Academy of Science, Shanghai excellent technical leader, etc.
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