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March 18-20, 2020
Shanghai New International Expo Centre

Dr. Anthony Yen

Dr. Anthony Yen

Vice President, ASML
San Jose, California, USA


Anthony (Tony) Yen is Vice President of ASML and head of its Technology Development Center. He joined ASML in 2017 with more than thirty years of experience in the field of nanopatterning.

Dr. Yen received his BSEE degree from Purdue University and his SM, EE, PhD, and MBA degrees from MIT. From 1991 to 1997, he was Member of Technical Staff at Texas Instruments and worked on resolution enhancing techniques in optical lithography in Dallas and at IMEC in Leuven. From 1997 to 2003, he was with TSMC where he first led the development of lithography processes for the company's 0.25, 0.18, 0.15, and 0.13 micron generations of logic integrated circuits and then co-led infrastructure development for next-generation-lithography technologies at SEMATECH. After a three-year stint at Cymer (now part of ASML) as Senior Vice President responsible for marketing, he returned to TSMC in 2006. As head of Nanopatterning Technology Infrastructure Division, he was responsible for developing EUV lithography, including its mask technology, for high-volume manufacturing.

Dr. Yen has over 120 US patents and 100 publications on the patterning of semiconductor devices and circuits. He is a fellow of IEEE and of SPIE, and a recipient of the Outstanding Electrical and Computer Engineer Award from Purdue University.