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June 27-29, 2020
Shanghai New International Expo Centre

Symposium VIII: MEMS, Sensors and Emerging Semiconductor Technologies


** to designate keynote talk - 30 min
* to designate invite talk - 25 min
  to designate regular talk - 15 min

Parallel Symposium Oral Sessions: June 29-July 17, 2020

Session I: MEMS and Sensors
** Monolithic integration of optical MEMS on CMOS

Matthias Schulze, Fraunhofer IPMS
* Silicon based nanopore and its application potential

Prof. Zewen Liu, Tsinghua University
* Integrated Photonics for Life Sciences – Cytometry and Microscopy

Niels Verellen, IMEC
Session II:
* Surface chemistry analysis of atomic layer deposition processes

Prof. Bonggeun Shong, Hongik University
* TBD

Bin Fu, Bosch Sensortec GmbH
Session III: Novel Materials and Processes
** Synthesis and applications of versatile 2-dimensional semiconductor materials

Prof. Ji Hoon Ahn, Hanyang University
* Overview of Various Approaches Toward Area Selective Deposition

Prof. Woo-Hee Kim, Hanyang University

Surface Analysis and Post Thermal Treatment Process Optimization of Graphene Oxide Thin Film for Humidity Sensor Application

Xiaoxu Kang, Shanghai IC R&D Center
Session IV: 3D Heterogeneous Integration Joint session ( VII & VIII)
** Diversity, Interconnect and Phase change: Semiconductor heterogenous integration and supper intelligence in the post Moore's Law era

Hu Chuan, Guangdong Academy of Sciences
** 3D Heterogeneous Integration
  Bill Bottoms, 3MTS
** Recent Achievements and New Technologies for High Performance Mems Sensors and Actuators
  Philippe Robert, CEA-LET
** 3D Packaging Development for HPC and 5G Applications

Chiang Shiuh-Kao, Prismark
Session V:

Characterization and Failure Analysis of High Electron Mobility Transistors using STEM-based Techniques

Dr. Chunzhi Gu, EAG Laboratories

Development of stepper solutions for IoT devices

TAO YUAN, CANON

Preparation of Fe-Mn-Ni-O Nano-Ceramics By Sol-gel auto combustion for Semiconductor Thermistor

NamChol Yu, KimChaek University of Technology

Subsurface damage characteristics of monocrystal β-Ga2O3 in abrasive machining

Shang Gao, Dalian University of Technology

Arbitrarily Polarized CMOS Terahertz Detector with Silicon-Based Plasmonic Antenna

Yiming Liao, Nanjing University of Science and Technology

Multiterminal Ultrathin Memristive Synapses based on monolayer molybdenum disulfide

Meng Yan, Tianjin University of Technology

Air-stable and high on/off ratio near-infrared photodetector based on perovskite-treated PbS colloidal quantum dots

Qingqing Wu, Shanghai IC R&D Center

Synthesis of Vertical MoS2/WS2 Heterostructure and its Photoelectric Properties

Xin Lin, Tianjin University of Technology

Conference Poster Session: June 26-July 17, 2020

  Effective Sparsity-Prior Image Denoising Algorithm for CMOS Image Sensor in Ultra-Low Light Imaging Applications
  Zhou Tao, Shanghai Integrated Circuits R&D Center Co., Ltd.