| ** | to designate keynote talk | Sponsored by: |
|
| * | to designate invite talk | ||
| to designate regular talk |
Session I: MEMS and Biosensors-I
| Opening Remarks |
| Qinghuang Lin |
| *Bio-inspired in-sensor vision adaptation for accurate perception (9:30-10:00, June 21, Microsoft Teams Meeting) |
| Yang Chai, The Hong Kong Polytechnic University |
| *Resonant piezoelectric MEMS sensors (10:00-10:30, June 21, Microsoft Teams Meeting) |
| Tianxiang Nan, Tsinghua University |
| *A simple MEMS technique enabled PERFECT filter for various clinical applications |
| Wei Wang, Peking University |
Session II: Materials and Archictures for Future Computing Platforms
| *ICL heterogeneous system integration solution |
| Odd Hung, ICLeague |
| *From Lab to Fab: Emerging Layered Semiconductor Industrial Synthesis, Device Engineering and Related Process Development |
| Chen Wang, Tsinghua University |
| *Characterization of neuromorphic response using a conductive atomic force microscope |
| Mario Lanza, King Abdullah University of Science and Technology (KAUST) |
Session III: Novel Materials and Processes
| *Innovations of Industry IGBT technologies and products |
| Jianhua Liu, GTA Semiconductor |
| *Toward Mass Production Of Metasurfaces |
| Qize Zhong, Shanghai University |
Session IV: MEMS and Biosensors-II
| *Sensors integrated with bio materials |
| Tie Li, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences |
| *AlN based piezoelectrically actuated multi-DOF MEMS micromirror |
| Hongbin Yu, Huazhong University of Science and Technology |
| Evaluation of Capacitive Humidity Sensor with Polyimide as Sensing Material |
| Xiaoxu Kang, Shanghai ICR&D Center |
| Quantum efficiency enhancement by optimizing BST design for NIR CMOS sensor |
| Chunshan Zhao, Shanghai Huali Integrated Circuit Corporation |
Session V: New Materials and Devices
| Device Modeling and Simulation of Ferroelectric Tunnel Junction for Computing-in-Memory Application |
| Yuyao Lu, Tsinghua University |
| Polarity-controllable WSe2 transistor enabled by inserting a h-BN layer |
| Zheng Bian, Zhejiang University |
| Study on small dead area high-voltage silicon PIN detectors |
| Tiesong Li, Peking University |
| Ultra-fast on-chip Sensing for PCR detection with machine learning-based image processing algorithm |
| Jingxuan Shen, Shanghai University |
|
|
Session VI: Machine Learning and AI in IC Manufaturing
| Based on Deep Learning CD-SEM Image Defect Detection System |
| Sen Wang, Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.(XMC) |
| Improving White Pixel through the Optimization of Structure and Implantation in CIS Device |
| Lu Wang, Shanghai Huali Microelectronics Corporation |
| Epitaxy equipment: For how long will China drive the market |
| Vishnu KUMARESAN, Yole Developpement |
Poster Session:
| Fabrication and Performance Research of Silicon Nanosheet Field Effect Transistor Biosensor |
| Enyi Xiong, North China University of Technology |
| Study on performance of Si3N4 enhanced microbolometer with salicided polysilicon thermistor in CMOS technology |
| Haolan Ma, Nanjing University |
| Influence of B Ions Doping on the Performance of p-type Silicon Nanowire Field Effect Transistor Biosensor |
| Jiawei Hu, Institute of Microelectronic of the Chinese Academy of Sciences |
| Investigation of FinFETs based Ion Sensitive Field Effect Transistor Sensor |
| Min Fang, Advanced Integrated Circuits & Center, Institute of Microelectronic of the Chinese Academy of Sciences |
| An SOI-based SiGe Heterojunction Phototransistor with large operation current range |
| Fu Zhu, Beijing University Of Technology |