Gao An 高安
CTO, ADVANCED MICRO OPTICS.INC
CTO，源卓微纳科技（苏州）股份有限公司

讲师简介 / Speaker Bio

Gao An graduated with a bachelor's degree from the Department of Microelectronics at Fudan University in 2008 and obtained his Ph.D. in Applied Physics from the University of Twente in the Netherlands in 2014. From 2010 to 2018, he worked at ASML in the Netherlands, holding positions such as Research Scientist and Technology Manager, where he was involved in the research and development of EUV and DUV lithography machines. Since 2023, he has served as the CTO of Yuanzhuo Micro-nano, focusing on the development of laser direct writing and projection lithography machines. Gao An has extensive expertise in the research and application of lithography technology, particularly excelling in system design and integration technology of lithography machines, photoelectric measurement technology, and contamination control technology. During his career, he has been granted more than ten patents.

摘要 / Abstract

The integration density of integrated circuit transistors follows Moore's Law of "doubling every two years." However, the trend of shrinking the planar size of a single transistor has gradually slowed down. At the same time, packaging technology has been advancing continuously, and new technologies such as chiplet have been developed in recent years. Consequently, the requirement for the interconnection density of packaging substrates is increasing rapidly, and lithography equipment urgently needs to improve resolution and overlay accuracy. The MSS - 01 is the latest model launched by Mikoptik in its projection lithography product series. It is mainly used in semiconductor packaging and substrate lithography processes. Leveraging years of experience accumulated together with customers in the IC packaging substrate industry and its self - designed optical system, it achieves a resolution of L/S = 1.4um with 85x85mm exposure field and significantly improves the overlay accuracy to ≤0.5 μm.As a leading supplier of the most advanced laser direct - imaging lithography solutions for IC packaging substrates, Mikoptik invests continually in technical innovation and has successfully launched innovative stepper lithography products. We are using more advanced micro nano processing technology to change human life.