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Nana He Molecular Filtration Product Manager, Camfil |
Biography NANA HE, Product Engineer of Molecular Filtration Master of Environmental Chemistry from University of Michigan.Used to work in Environmental Lab of University of Michigan with focus of pollution control. In charge of support for AMC control projects in Camfil China. Abstract Introduction of AMC control concept, AMC filtration solution for advanced semiconductor manufacturing, and AMC filtration for process tool. |