Dr. Shih-Cheng Hu
Director, National Taipei University of Technology

Biography

Shih-Cheng Hu(PhD the University of Liverpool). After working in private sector as a building service engineer for two years and as a staff researcher in Heating, Ventilation and Air-Conditioning (HVAC) systems at Energy and Resources Labs, Industrial Technology Research Institute (ITRI) Taiwan for six years, he joined the National Taipei University of Technology in 1998 as an assistant professor. He is currently a Distinguished Professor and director of center for clean technology research, specializing in high-tech manufacturing related topics including cleanroom air quality control, testing and modeling of semiconductor storage and transport equipment, airborne molecular contamination (AMC) control for wafer and TFT/LCD processing, innovative/energy efficient design of HVAC systems of cleanrooms, etc. Prof. Hu was the editor-in-chief of Journal of Cleaning Technology from 2004 to 2010 (in Chinese) and is the author of more than 100 book chapters, journal publications and fully-reviewed conference papers. He is the major co-authors of the “ASHRAE Cleanroom Design Guide”.

Abstract

This study employs the developed simulation software for the energy use of the high-tech fabrication plant (hereafter referred as a fab) to examine six energy-saving approaches for the make-up air unit (MAU) of a TFT-LCD (thin-film transistor liquid-crystal display) fab. The studied approaches include: (1) Approach 1: adjust the set point of dry bulb temperature and relative humidity in the cleanroom; (2) Approach 2: lower the flow rate of supply air volume in the MAU; (3) Approach 3: use a draw-through type instead of push through type MAU; (4) Approach 4: combine the two stage cooling coils in MAU to a single stage coil; (5) Approach 5: reduce the original MAU exit temperature from 16.5 °C to 14.5 °C; and (6) Approach 6: avoid an excessive increase in pressure drop over the filter by replacing the HEPA filter more frequently. The simulated results are further compared to the measured data of the studied TFT-LCD fab in Taiwan. The simulated results showed that Approach 1 exhibits more significant influence on annual power consumption than the other approaches. The advantage/disadvantage of each approach is elaborated. The impact of the six approaches on the annual power consumption of the fab is also discussed.