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English
March 14-16,2018
Shanghai New International Expo Centre

KIRK HASSERJIAN

KIRK HASSERJIAN
Corporate Vice President, Service Product Development and Applied Global Services, Applied Materials, Inc.

Biography

Kirk Hasserjian is corporate vice president for Applied Global Services organization and leads the Service Product Development organization. His group is responsible for creating comprehensive service products utilizing data analytics to improve all aspects of tool performance for Applied’s customers. Prior to this, he led the Silicon Systems Group Strategic Programs, where he was responsible for the critical growth programs to improve the company’s future including Applied’s 450mm efforts. Since joining Applied as appointed vice president for the SunFab operations organization in May 2009, he drove significant improvements and became corporate vice president and general manager of the SunFab Thin Film Solar business.

Prior to joining Applied, Mr. Hasserjian served in a variety of technical and management roles, most recently as senior vice president for Global Manufacturing Operations at FormFactor, Inc. He previously spent 25 years at Intel Corporation, where his responsibilities included leading Intel’s Flash memory technology development activities in NOR, NAND and future non-volatile memory technologies as General Manager of California Technology and Manufacturing. He also held technical and management positions in the company’s D2 development and manufacturing facility, including five years as D2 plant manager managing the facility’s factory performance and all technology module development activities.

Mr. Hasserjian received his bachelor of science degree in chemistry from the University of San Francisco and a master of science degree in chemical engineering from Stanford University.

Abstract

The landscape of microelectronics manufacturing is changing rapidly as advanced technologies grow in the number of steps and complexity of the processes used by leading semiconductor manufacturers. This has led to exponential growth in the amount of data that is being generated both from the equipment and the process monitors in the factory along with the capabilities for managing and analyzing that data. In light of the opportunities that we see with these big data advancements, it is time to re-examine current practices so that we can take full advantage of this data to improve overall factory performance. The role of services in keeping a fab running at the highest levels of performance will continue to grow, and the techniques need to be developed to facilitate this increased level of cooperation between the equipment suppliers and semiconductor manufacturers. Sophisticated diagnostic tools that leverage improved data management capabilities, combined with expertise around the equipment and process, are needed to accomplish the output and yield goals that semiconductor manufacturers require. Fault detection, run to run control, predictive maintenance and virtual metrology, combined with the detailed understanding of the equipment and processes are evolving to be an effective combination to drive factory output and yield. This presentation will discuss this evolution and illustrate what is possible both in practice and in the future.