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+86.21.6027.8500
English
March 20-22, 2019
Shanghai New International Expo Centre

Xinglong Chen

Xinglong Chen
CTO of KINGSEMI Co., Ltd.

专业领域/PROFSSIONAL PROFILE

长期从事半导体设备和器件领域的一线研究和开发,熟知半导体设备的完整PLC开发流程。曾在应用材料公司和三星电子生产技术研究所领导多个重量级研发项目,覆盖从可行性研究和立项直到产品发布。
Proven record of driving full PLC of complex semiconductor capital equipment development, led multiple high-impact R&D projects from initial concepts to successful high-value products at Applied Materials and Samsung Electronics.

在半导体设备工程,工艺流程,材料科学以及供应链管理方面具有丰富经验。
Extensive experience in semiconductor equipment engineering, processes, materials, and supply chain management.

在各种半导体设备的研发和制造方面具备坚实的理论和实践基础,包括 CVD/ALD,dry Etch,RIE, RTP, EPI/SEG, PVD, 光刻和清洗 track 设备等。在半导体设备工程的机械设计,流体流动控制,传热传质,射频和等离子体,真空以及系统集成方面具有强大的理论分析和动手实践能力。
Solid background in broad disciplines of semiconductor equipment engineering and manufacturing, including CVD/ALD, dry Etch, RIE, RTP, EPI/SEG, PVD, Photo and clean track equipment. Strong analytical and hands-on skill set in mechanical design, fluid flow, heat transfer, RF & Plasma, vacuum and system integration.

深入了解各种先进半导体器件(包括逻辑器件,DRAM和VNAND)的工艺流程以及设备要求,下一代器件技术和市场发展方向及其对未来设备研发的影响和要求。
Insight into advanced semiconductor device (including logic, DRAM, and VNAND) integration flow, emerging technologies and market directions, and their impact on future equipment development.

工作经验/Working experience

沈阳芯源微电子设备有限公司
CTO
2018
   
三星电子,Samsung Electronics, Hwaseong, Korea
首席工程师, Principal Engineer
2014 - 2018
   
应用材料公司,Applied Materials Inc. Santa Clara, CA
高级工程经理, Sr. Engineering Manager
2005 - 2014
   

教育背景/Education background

康奈尔大学 (Cornell University)    Ithaca, NY
机械和航空工程系,博士
PhD, Mechanical and Aerospace Engineering
2001 - 2005
   
清华大学 (Tsinghua University) Beijing, China
工程力学系,硕士/博士
M.S., Engineering Mechanics
1992 - 2001
   

摘要 / Speech summary

简单介绍芯源公司的历史沿革,公司现状和市场定位。主题内容为前道匀胶显影设备技术概况,业界动向和芯源公司全新前道设备的研发现状和技术特征

First briefly introduces the company history, status and market positioning of KINGSEMI Co., Ltd.

Main topic for the speech covers a brief review of FEOL coating and developing equipment technology and industry trends, follows with the development status and technical features of the latest offering of FEOL track from KINGSEMI.