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Dr. Songlin Xu is a Sr. Director of Technology at Advanced Micro-Fabrication Equipment Inc (AMEC). He is responsible for the product development and application of dual-station deep silicon and thin-film ICP etchers. Before joining AMEC, he worked at Applied Materials and Mattson Technology in US for more than 15 years. He participated in the development of 200mm and 300mm ICP plasma etchers for silicon and dielectric etching and drove their applications to customers. He published more than 10 technical papers on plasma etching on major journals in US and Japan, and holds multiple patents.
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