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Senior Fellow and General Manager of Global Market & Technology Strategy, ULVAC Employment: In 1993 and since then has been leading and engaging with developments of numerous semiconductor and electronics technologies including emerging non-volatile memories, high-K capacitors, LED, power devices, thin-film Li-battery as well as 3D packaging manufacturing technologies. He was General Manager of Institute of Semiconductor and Electronics Technologies of the company from 2008 to 2014. Now he is ULVAC Senior Fellow and General Manager of Global Market & Technology Strategy Division of the company. Expertise: • Technology Development of High Permittivity Thin Film Used on the High-Volume Capacitor for the Mass Production of the Next Generation DRAM • Technology Development for the Mass Production of FeRAM (by Sputtering, MOCVD, Plasma Etching and Ashing etc.) • Technology Development for the Mass Production of ReRAM • Technology Development for the Mass Production of PCRAM (by Sputtering and MOCVD etc.) • Research Development for the Thin Film Li-ion Battery. • Ferroelectric MEMS Technology Development for the Mass Production of the Sensor. • LED Mass Production Technology Development Speech Abstract: Thin-film Processing Technologies for Smart Society Key technologies enabling "Smart Society", such as IoT, AI, 5G will require new computing technology, MEMS/sensor technolory and energy technology (battery, power device). We have been continuously developing manufacturing solutions for all these technologies. In this time, we would like to talk about thin-film processing solution development topicss in ULVAC's strategy including the trend on "Smart Society" related technologies such as Non-Volatile Memory (PCRM,ReRAM) MEMS / sensor and Lithium Thin film Battery. |
